October 12, 2026
SAN FRANCISCO, Calif. — SEMICON West 2026 — Brooks Automation today announced the introduction of the PreciseFlex™ c10 CR Cleanroom Robot, a new automation solution designed specifically for semiconductor cleanroom environments. The robot will be showcased at SEMICON West in San Francisco, where visitors can see how manufacturers can increase throughput while reducing valuable cleanroom footprint through automated handling of SMIF and reticle pods.
The PreciseFlex c10 CR combines Brooks Automation’s proven PreciseFlex robot architecture with cleanroom compatibility, delivering ISO Class 4 performance at rated speed (with the ability to achieve ISO Class 3). Designed for semiconductor manufacturing and advanced cleanroom applications, the robot automates the transfer of SMIF pods, reticle pods, and other payloads between storage systems and process equipment.
“Semiconductor manufacturers continue to face pressure to increase productivity while making the most of expensive cleanroom real estate,” said Brian Carlisle, Sr Product Line Director. “The PreciseFlex c10 CR addresses both challenges by automating SMIF and reticle pod handling in a compact footprint, enabling customers to increase throughput, improve operational efficiency, and maximize the utilization of their cleanroom environments.”
Visitors to SEMICON West can learn more about the PreciseFlex c10 CR and discuss cleanroom automation applications with Brooks Automation experts at Booth #1253.
About Brooks Automation
Brooks is a provider of automation and holistic contamination control solutions for mission-critical semiconductor manufacturing workflows, enabling the precise movement, handling, cleaning, and storage of highly valued wafers, substrates, carriers, and reticles. Brooks is headquartered in Chelmsford, MA, with operations in North America, Europe, Asia, Australia and the Middle East.
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